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| MOTOROLA SEMICONDUCTOR TECHNICAL DATA Order this document by MPXL5010/D MPXL5010 Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated The MPXL5010 low profile series piezoresistive transducer is a state-of-the-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. Features * Low Profile Package * 5.0% Maximum Error over 0 to 85C * Ideally Suited for Microprocessor or Microcontroller-Based Systems * Patented Silicon Shear Stress Strain Gauge * Available in Differential and Gauge Configurations * Also Available in Unibody Package (see MPX5010 Data Sheet) Application Examples * Hospital Beds * HVAC * Respiratory Systems * Process Control VS 2 SERIES OPERATING OVERVIEW INTEGRATED PRESSURE SENSOR 0 to 10 kPa (0 to 1.45 psi) 0.2 to 4.7 Volts Output CASE 469-01, STYLE 1 CASE 472B-01, STYLE 1 X-ducer SENSING ELEMENT THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 3 GND GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY 4 Vout PINS 1 AND 5 THROUGH 8 ARE NO CONNECTS CASE 472-01, STYLE 1 Figure 1. Fully Integrated Pressure Sensor Schematic 1 PIN NUMBER N/C VS Ground Vout 5 6 7 8 N/C N/C N/C N/C 2 MAXIMUM RATINGS(1) Parametrics Overpressure(2) (P1 > P2) Burst Pressure(2) (P1 > P2) Storage Temperature Operating Temperature Symbol Pmax Pburst Tstg TA Value 75 100 - 40 to +125 - 40 to +125 Unit kPa kPa C C 3 4 NOTE: Pins 1, 5, 6, 7 and 8 are internal device connections. Do not connect to external circuitry or ground. 1. TC = 25C unless otherwise noted. 2. Exposure beyond the specified limits may cause permanent damage or degradation to the device. Senseon and X-ducer are trademarks of Motorola, Inc. REV 2 Motorola Sensor Device Data (c) Motorola, Inc. 1997 1 MPXL5010 SERIES OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25C unless otherwise noted, P1 > P2) Characteristic Pressure Range(1) Supply Voltage(2) Supply Current Minimum Pressure Offset(3) @ VS = 5.0 Volts Full Scale Output(4) @ VS = 5.0 Volts Full Scale Span(5) @ VS = 5.0 Volts Accuracy(6) Sensitivity Response Time(7) Output Source Current at Full Scale Output Warm-Up Time(8) Offset Stability(9) Decoupling circuit shown in Figure 3 required to meet Electrical Specifications. (0 to 85C) (0 to 85C) (0 to 85C) (0 to 85C) Symbol POP VS Io Voff VFSO VFSS -- V/P tR IO+ -- -- Min 0 4.75 -- 0 4.475 -- -- -- -- -- -- -- Typ -- 5.0 7.0 0.2 4.7 4.5 -- 450 1.0 0.1 20 0.5 Max 10 5.25 10 0.425 4.925 -- 5.0 -- -- -- -- -- Unit kPa Vdc mAdc Vdc Vdc Vdc %VFSS mV/kPa ms mAdc mSec %VFSS MECHANICAL CHARACTERISTICS Characteristic Weight, Basic Element Symbol -- Min -- Typ 1.5 Max -- Unit Grams NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. * TcSpan: Output deviation over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. * Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm-up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. 9. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 2 Motorola Sensor Device Data MPXL5010 SERIES ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING Figure 2 illustrates the Differential/Gauge Sensing Chip in the basic Low Profile Package (Case 469). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The MPXL5010 series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application. Figure 3 shows a typical decoupling circuit for interfacing the integrated sensor to the A/D input of a microprocessor. Proper decoupling of the power supply is recommended. Figure 4 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0 to 85C using the decoupling circuit below. (The output will saturate outside of the specified pressure range.) STAINLESS STEEL METAL COVER DIE P1 FLUORO SILICONE DIE COAT WIRE BONDS Figure 2. Cross-Sectional Diagram (Not to Scale) OUTPUT (V) Motorola Sensor Device Data EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE CCC EEEEEEEEEEE CCC EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EPOXY CASE LEAD FRAME 5.0 TRANSFER FUNCTION: 4.5 V = V *(0.09*P+0.04) ERROR out S 4.0 VS = 5.0 Vdc TEMP = 0 to 85C 3.5 3.0 2.5 2.0 1.5 1.0 0.5 0 0 1 2 MAX MIN TYPICAL MPXL5010 OUTPUT (PIN 4) 50 pF 51 k A/D PROCESSOR Figure 3. Typical Decoupling Filter for Sensor to Microprocessor Interface 4 5 6 8 3 7 DIFFERENTIAL PRESSURE (kPa) 9 10 11 Figure 4. Output versus Pressure Differential 3 MPXL5010 SERIES Transfer Function (MPXL5010) Nominal Transfer Value: Vout = VS x (0.09 x P + 0.04) Nominal Transfer Value: (Pressure Error x Temp. Factor x 0.09 x VS) Nominal Transfer Value: VS = 5.0 V 0.25 Vdc Temperature Error Band MPXL5010 Series 4.0 3.0 Temperature Error Factor 2.0 1.0 0.0 -40 -20 0 20 40 60 80 100 120 140 Temp - 40 0 to 85 +125 Multiplier 3 1 3 Temperature in C NOTE: The Temperature Multiplier is a linear response from 0 to -40C and from 85 to 125C. Pressure Error Band 0.5 0.4 0.3 Pressure Error (kPa) 0.2 0.1 0 -0.1 -0.2 -0.3 -0.4 -0.5 0 1 2 3 4 5 6 7 8 9 10 Pressure (kPa) MPXL5010 Series Pressure 0 to 10 kPa Error (Max) 0.5 kPa 4 Motorola Sensor Device Data MPXL5010 SERIES PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluorosilicone gel which protects the die from the environment. The Motorola pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. ORDERING INFORMATION The MPXL5010 pressure sensor is available in differential and gauge configurations. Devices are available in the basic element package or with pressure port fittings. MPXL Series Device Name DiN MPXL5010G7U MPXL5010G8U MPXL5010GC7U Options Oi No Port, 84 Lead Bend No Port, 4-Straight Leads Axial Port, 84 Lead Bend Case Type C T 472 469 472B Shipping Method Tubes (Sleeve Pack) Tubes (Sleeve Pack) Tubes (Sleeve Pack) Device Marking MPXL5010G MPXL5010G MPXL5010G Motorola Sensor Device Data 5 MPXL5010 SERIES PACKAGE DIMENSIONS -A- F 1 8 G -B- 4 5 NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. VERTICAL SURFACES MAY BE UP TO 5 DRAFT. INCHES MIN MAX 0.658 0.668 0.541 0.551 0.207 0.217 0.046 0.054 0.026 0.034 0.100 BSC 0.107 0.117 0.009 0.011 0.280 0.292 0.138 0.150 0.972 1.006 0.503 0.523 MILLIMETERS MIN MAX 16.71 16.97 13.74 13.99 5.26 5.51 1.17 1.37 0.66 0.86 2.54 BSC 2.72 2.97 0.23 0.28 7.11 7.42 3.50 3.81 24.69 25.55 12.78 13.28 L K R J HC P D 8 PL 0.25 (0.010) M -T- TB S A S DIM A B C D F G H J K L P R CASE 469-01 ISSUE O STYLE 1: PIN 1. 2. 3. 4. 5. 6. 7. 8. NC VSUPPLY GROUND VOUT NC NC NC NC MARKING SURFACE -A- G 1 8 W 4 5 -B- NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. VERTICAL SURFACES MAY BE UP TO 5 DRAFT. 6. DIMENSION P TO CENTER OF LEAD WHEN FORMED PARALLEL. DIM A B C F G J L M P R S U V W X Y INCHES MIN MAX 0.658 0.668 0.541 0.551 0.555 0.595 0.026 0.034 0.100 BSC 0.009 0.011 0.138 0.150 0_ 15 _ 0.735 0.745 0.185 0.195 0.155 0.165 0.120 0.130 0.305 0.315 0.561 0.571 0.010 0.025 0.002 0.020 MILLIMETERS MIN MAX 16.71 16.97 13.74 13.99 14.10 15.11 0.66 0.86 2.54 BSC 0.23 0.28 3.50 3.81 0_ 15_ 18.67 18.92 4.69 4.95 3.94 4.19 3.05 3.30 7.75 8.00 14.25 14.50 0.25 0.63 0.05 0.51 P X R S V U Y L M J F 8 PL 0.25 (0.010) M C -T- TB S A S CASE 472B-01 ISSUE O STYLE 1: PIN 1. 2. 3. 4. 5. 6. 7. 8. NC VSUPPLY GROUND VOUT NC NC NC NC 6 Motorola Sensor Device Data MPXL5010 SERIES PACKAGE DIMENSIONS-CONTINUED -A- G 1 8 -B- 4 5 P NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. VERTICAL SURFACES MAY BE UP TO 5 DRAFT. 6. DIMENSION P TO CENTER OF LEAD WHEN FORMED PARALLEL. DIM A B C F G J L Y M P R INCHES MIN MAX 0.658 0.668 0.541 0.551 0.209 0.237 0.026 0.034 0.100 BSC 0.009 0.011 0.138 0.150 0.002 0.020 0_ 15_ 0.735 0.745 0.508 0.518 MILLIMETERS MIN MAX 16.71 16.97 13.74 13.99 5.31 6.02 0.66 0.86 2.54 BSC 0.23 0.28 3.50 3.81 0.05 0.51 0_ 15 _ 18.67 18.92 12.90 13.16 R Y L M J F 8 PL 0.25 (0.010) M C -T- SEATING PLANE TB S A S CASE 472-01 ISSUE O STYLE 1: PIN 1. 2. 3. 4. 5. 6. 7. 8. NC VSUPPLY GROUND VOUT NC NC NC NC Motorola Sensor Device Data 7 MPXL5010 SERIES Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. Mfax is a trademark of Motorola, Inc. How to reach us: USA / EUROPE / Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 303-675-2140 or 1-800-441-2447 JAPAN: Nippon Motorola Ltd.; Tatsumi-SPD-JLDC, 6F Seibu-Butsuryu-Center, 3-14-2 Tatsumi Koto-Ku, Tokyo 135, Japan. 81-3-3521-8315 MfaxTM: RMFAX0@email.sps.mot.com - TOUCHTONE 602-244-6609 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; 8B Tai Ping Industrial Park, - US & Canada ONLY 1-800-774-1848 51 Ting Kok Road, Tai Po, N.T., Hong Kong. 852-26629298 INTERNET: http://motorola.com/sps 8 MPXL5010/D Motorola Sensor Device Data |
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